Article detail · 2026
Automated SEM image processing for precision metrology in semiconductor devices
YÖKSİS
OpenAlex
SJR Q1
JCR Q1
Citations 0
Percentile 37.4%
FWCI 0.0
- Year
- 2026
- Type
- article
Data source split
- YÖKSİS YÖKSİS article record
- YÖKSİS venue Surfaces and Interfaces
- Catalog match (ISSN) Surfaces and Interfaces
- OpenAlex OpenAlex enrichment (abstract, citations, topics)
Abstract
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Topics
Citations
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0 citations
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