Article detail · 2019

Optical and structural characterization of silicon nitride thin films deposited by PECVD

Materials Science and Engineering B-Advanced Functional Solid-State Materials

YÖKSİS OpenAlex ISSN 0921-5107 DOI 10.1016/j.mseb.2019.05.024 Citations 59 SJR Q1 JCR Q1

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Abstract

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Type: article Silicon Nanostructures and Photoluminescence

WoS (JCR) and Scopus (SJR) quartiles by ISSN and publication year. · 2019

Scopus (SJR) / WoS (JCR)

Scopus (SJR) Q1 0,944 Year 2019

WoS (JCR) Q1 JIF 4,7 Year 2019