Makale detayı · 2008
Conduction mechanism analysis in FeSi2 n Si heterojunction through J V T measurement
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
- Yıl
- 2008
- ISSN
0268-1242- Tür
- article
Veri kaynağı ayrımı
- YÖKSİS YÖKSİS makale kaydı
- OpenAlex OpenAlex zenginleştirmesi (özet, atıf, konular)
Özet
İngilizce (OpenAlex)
The p-type iron disilicide (β-FeSi 2 ) semiconductor was formed at room temperature without heat treatment due to the superiority of the employed unbalanced magnetron sputtering technique on n-type crystalline silicon (n-Si), and conduction mechanism(s) of the resulting p-β-FeSi 2 /n-Si heterostructure was investigated by current density–voltage–temperature ( J – V – T ) measurement in darkness condition under vacuum after evaporation of both chromium (Cr) and gold (Au) metals as the front electrode. Two different current mechanisms seemed to be dominant on Cr/β-FeSi 2 /n-Si and Au/β-FeSi 2 /n-Si heterostructures, respectively. The transition of one mechanism to another occurred in a particular bias voltage range: between ∼3 kT/q and 0.3 V, the multistep tunneling capture emission (MSTCE) mechanism became dominant with an activation energy ( E A ) around 0.3 eV for both forward and reverse directions of bias and interpreted as an Fe impurity. Also, the reverse current density had a square-root dependence on reverse bias voltage, thus proposing generation current. In this frame, at an E A of 0.3 eV above the valance band edge denoted the efficient trap level for the recombination–generation mechanism in the β-FeSi 2 semiconductor or at the interface of the β-FeSi 2 /Si heterojunction. Subsequently, as the second mechanism, space charge limited current (SCLC) started at a high forward bias voltage region (from 0.65 V to 1 V), where the power of the bias ( m ) changed from high to low value as the ambient temperature was increased (110 K to 380 K). A further increase in bias voltage (above 1 V) yielded a series resistance region where thermally activated current was observed, representing a conduction band offset, Δ E c . Its value was determined as 0.16 eV, consistent with the announced values in the literature.
Konular
- Semiconductor materials and interfaces
- Integrated Circuits and Semiconductor Failure Analysis
- Semiconductor materials and devices
Birincil konu Semiconductor materials and interfaces