A MEMS on Fiber Multisensor Platform for Surgical Assistance

OpenAlex İngilizce

We developed a microelectromechanical system for simultaneous temperature and pressure measurements, which is integrated on a fiber. The developed platform is integrated at the tip of a fiber optic cable for surgical assistance. The platform comprises a three-layer sealed micrometer-scale membrane that deflects in response to external pressure. Moreover, we exploit the change in bandgap wavelength of the Gallium Arsenide substrate to monitor temperature. The developed multi-sensor is capable of point-wise and decoupled measurements, owing to its compact form factor and different physical principles used for sensing of temperature and pressure. Both sensors are interrogated using a multimode fiber that is butt-coupled to the substrate, allowing for simple integration and alignment as opposed to a singlemode fiber. Furthermore, the exploitation of graded-index in the fiber core enables measurement immunity to fiber bending. Experiments were conducted in a pressure chamber and on ex vivo tissue. We measured sensitivities of 9.04 nm/mmHg in displacement for pressure and –1.38% /°C in optical power for temperature. With further development, the proposed device can be adapted to a clinical setting as a assistive tool during ablative medical operations, in determining ablation boundaries while monitoring intravascular or organ pressure as a vital signal.